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PDF MS7901 Data sheet ( Hoja de datos )
| Número de pieza | MS7901 | |
| Descripción | PRESSURE SENSOR DIE | |
| Fabricantes | Intersema | |
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MS7901
PRESSURE SENSOR DIE (0-1 BAR)
• 0 to 100 kPa range (1 bar or 14.5 PSI)
• Absolute/differential pressure sensors
• RoHS-compatible & Pb-free1
DESCRIPTION
The sensor element of the MS7901 consists of a silicon micro-machined membrane. Implanted resistors make
use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal. This
sensor, which has outstanding linearity and span values, is available in various configurations. The absolute
pressure sensor employs a sealed vacuum reference cavity underneath the membrane. The Pyrex glass wafer
used for this sealing has a thickness of 0.2 mm (MS7901-A_0.2) or 0.5 mm (MS7901-A_0.5). There are two
gauge versions available: one with a drilled Pyrex glass (MS7901-D) and the other without Pyrex glass
(MS7901-S).
FEATURES
• Uncompensated pressure sensor die
• Output span 150mV @ 5V
• Temperature range -40°…+125°C
• Linearity 0.05% (typical)
• Very small die size 1.78 x 1.78 mm (MS7901-A)
• Low cost, high reliability
APPLICATION
• Absolute pressure sensor systems
• Differential/gauge pressure sensor systems
• Barometers, altimeters
• Variometers
ELECTRICAL CONNECTIONS
Positive output for pressure applied topside
Vs+ / EPI
Vs+ : Supply voltage of Wheatstone bridge
Epi : Connection of epitaxial layer (membrane)
Out- : Negative output
Out+
Out-
Out+ : Positive output
GND1 : Ground
GND2 : Ground
R5+ R6+ R5+ : Reference Resistor 5: positive access
R5 and R6 are
GND1 GND2
placed on bulk
R5- R6-
R5- : Reference Resistor 5: negative access
R6+ : Reference Resistor 6: positive access
R6- : Reference Resistor 6: negative access
1 The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment)
bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers
(PBDE).
DA7901_005.doc
00007901872
ECN 1178
January 23rd, 2009
1/5
1 page  
ORDERING INFORMATION
Product Code
MS7901-A_0.2
MS7901-A_0.5
MS7901-D
MS7901-S
Type
Absolute
Absolute
Differential
Differential
Product
1 bar Pressure Sensors 0.2 mm Pyrex sawn on b/f
1 bar Pressure Sensors 0.5 mm Pyrex sawn on b/f
1 bar Pressure Sensors sawn on b/f
1 bar Pressure Sensors no pyrex sawn on b/f
The MS7901 dice are supplied sawn on blue foil, mounted on plastic rings.
FACTORY CONTACTS
Art.-Nr.
790125022
790125021
790125121
790125221
Intersema Sensoric SA
Ch. Chapons-des-Prés 11
CH-2022 BEVAIX
SWITZERLAND
Tel. 032 847 9550
Tel. Int. +41 32 847 9550
Telefax +41 32 847 9569
e-mail:
http://www.intersema.ch
NOTICE
Intersema reserves the right to make changes to the products contained in this data sheet in order to improve the design or performance
and to supply the best possible products. Intersema assumes no responsibility for the use of any circuits shown in this data sheet, conveys
no license under any patent or other rights unless otherwise specified in this data sheet, and makes no claim that the circuits are free from
patent infringement. Applications for any devices shown in this data sheet are for illustration only and Intersema makes no claim or
warranty that such applications will be suitable for the use specified without further testing or modification.
DA7901_005.doc
00007901872
ECN 1178
January 23rd, 2009
5/5
5 Page | ||
| Páginas | Total 5 Páginas | |
| PDF Descargar | [ Datasheet MS7901.PDF ] | |
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