MS79005 PDF даташит
Спецификация MS79005 изготовлена «Intersema» и имеет функцию, называемую «PRESSURE SENSOR DIE». |
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Детали детали
Номер произв | MS79005 |
Описание | PRESSURE SENSOR DIE |
Производители | Intersema |
логотип |
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MS79005
PRESSURE SENSOR DIE (0-0.5 BAR)
• 0 to 50 kPa range (500 mbar or 7.5 PSI)
• Absolute/differential pressure sensors
• RoHS-compatible & Pb-free1
DESCRIPTION
The sensor element of the MS79005 consists of a silicon micro-machined membrane. Implanted resistors make
use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal. This
sensor, which has outstanding linearity and span values, is available in various configurations. The absolute
pressure sensor employs a sealed vacuum reference cavity underneath the membrane. The Pyrex glass wafer
used for this sealing has a thickness of 0.2 mm (MS79005-A_0.2) or 0.5 mm (MS79005-A_0.5). Two gauge
versions available: one with a drilled Pyrex glass (MS79005-D) and the other without Pyrex glass (MS79005-S).
FEATURES
• Uncompensated pressure sensor die
• Output Span 150mV @ 5V
• Temperature Range -40°…+125°C
• Linearity 0.05% (typical)
• Very small Die Size 1.78 x 1.78mm (MS79005-A)
• Low Cost, High reliability
APPLICATION
• For absolute or differential pressure sensor systems
• Variometers
ELECTRICAL CONNECTIONS
Positive output for pressure applied topside
Vs+ / EPI
Out+
Out-
R5+ R6+
GND1 GND2
R5- R6-
R5 and R6 are
placed on bulk
Vs+ : Supply voltage of Wheatstone bridge
Epi : Connection of epitaxial layer (membrane)
Out- : Negative output
Out+ : Positive output
GND1 : Ground
GND2 : Ground
R5+ : Reference Resistor 5: positive access
R5- : Reference Resistor 5: negative access
R6+ : Reference Resistor 6: positive access
R6- : Reference Resistor 6: negative access
1 The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment)
bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers
(PBDE).
DA79005_000.doc
000790051447
ECN 1186
May 07, 2009
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BOND PAD CONFIGUTRATION
Vs+/Epi
MS7901
Out-
R5+ R6+
R5- R6-
Out+ GND1 GND2
Important remarks:
As the sensing elements are diffused resistances, the voltage
applied on the ground pads (GND1 and GND2) has to be lower
than the voltage applied on supply voltage pad (Vs+).
The epitaxial layer is connected to the Vs+ pin under the pad.
Gold ball bonding or aluminium wedge bonding can be used to
wire-bond the sensor. The quality of the wire-bonding is equipment
and process dependant. For this reason, it is strongly
recommended that a thorough wire-bonding qualification is made
by the end user if the sensor is going to be operated over an
extended temperature range.
LAYOUT (Absolute sensors)
MS79005-A_0.2
MS79005-A_0.2
DA79005_000.doc
000790051447
ECN 1186
Pad opening in passivation is 100 µm
May 07, 2009
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LAYOUT (Gauge sensors)
MS79005-D
MS79005-S
FULL SCALE PRESSURE
Pad opening in passivation is 100 µm
kPa bar mbar PSI
50 0.5 500 7.5
atm mm Hg
0.5 375
m H2O
5.1
Inches H2O
200
ABSOLUTE MAXIMUM RATINGS
Parameter
Supply voltage
Storage temperature
Pressure overload
Symbol
VS+
TS
Conditions
Ta = 25 oC
DA79005_000.doc
000790051447
ECN 1186
May 07, 2009
Min Max Unit
20 V
-40 +150 oC
3 Bar
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Номер в каталоге | Описание | Производители |
MS79005 | PRESSURE SENSOR DIE | Intersema |
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