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Número de pieza | MPXL5010GC7U | |
Descripción | Integrated Silicon Pressure Sensor | |
Fabricantes | Motorola Semiconductors | |
Logotipo | ||
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SEMICONDUCTOR TECHNICAL DATA
Order this document
by MPXL5010/D
Integrated Silicon Pressure Sensor
On-Chip Signal Conditioned,
Temperature Compensated
and Calibrated
The MPXL5010 low profile series piezoresistive transducer is a state–of–the–art
monolithic silicon pressure sensor designed for a wide range of applications, but
particularly those employing a microcontroller or microprocessor with A/D inputs. This
patented, single element transducer combines advanced micromachining techniques,
thin–film metallization, and bipolar processing to provide an accurate, high level analog
output signal that is proportional to the applied pressure.
Features
• Low Profile Package
• 5.0% Maximum Error over 0° to 85°C
• Ideally Suited for Microprocessor or Microcontroller–Based Systems
• Patented Silicon Shear Stress Strain Gauge
• Available in Differential and Gauge Configurations
• Also Available in Unibody Package (see MPX5010 Data Sheet)
Application Examples
• Hospital Beds
• HVAC
• Respiratory Systems
• Process Control
VS
2
MPXL5010
SERIES
OPERATING OVERVIEW
INTEGRATED
PRESSURE SENSOR
0 to 10 kPa (0 to 1.45 psi)
0.2 to 4.7 Volts Output
CASE 469–01, STYLE 1
CASE 472B–01, STYLE 1
X–ducer
SENSING
ELEMENT
THIN FILM
TEMPERATURE
COMPENSATION
AND
GAIN STAGE #1
GAIN STAGE #2
AND
GROUND
REFERENCE
SHIFT CIRCUITRY
4
Vout
3 PINS 1 AND 5 THROUGH 8 ARE NO CONNECTS
CASE 472–01, STYLE 1
GND
Figure 1. Fully Integrated Pressure Sensor Schematic
MAXIMUM RATINGS(1)
Parametrics
Symbol
Value
Unit
Overpressure(2) (P1 > P2)
Burst Pressure(2) (P1 > P2)
Pmax
Pburst
75 kPa
100 kPa
Storage Temperature
Tstg
– 40° to +125°
°C
Operating Temperature
TA
– 40° to +125°
°C
1. TC = 25°C unless otherwise noted.
2. Exposure beyond the specified limits may cause permanent damage or degradation to the device.
PIN NUMBER
1 N/C 5
2 VS
6
3 Ground 7
4 Vout
8
N/C
N/C
N/C
N/C
NOTE: Pins 1, 5, 6, 7 and 8 are
internal device connections. Do not
connect to external circuitry or
ground.
Senseon and X–ducer are trademarks of Motorola, Inc.
REV 2
© MMotootroolrao, lIanc.S1e9n97sor Device Data
1
1 page MPXL5010 SERIES
PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE
Motorola designates the two sides of the pressure sensor
as the Pressure (P1) side and the Vacuum (P2) side. The
Pressure (P1) side is the side containing fluorosilicone gel
which protects the die from the environment. The Motorola
pressure sensor is designed to operate with positive differen-
tial pressure applied, P1 > P2.
ORDERING INFORMATION
The MPXL5010 pressure sensor is available in differential and gauge configurations. Devices are available in the basic ele-
ment package or with pressure port fittings.
MPXL Series
Device Name
Options
Case Type
Shipping Method
Device Marking
MPXL5010G7U
No Port, 84° Lead Bend
472 Tubes (Sleeve Pack) MPXL5010G
MPXL5010G8U
No Port, 4–Straight Leads
469 Tubes (Sleeve Pack) MPXL5010G
MPXL5010GC7U
Axial Port, 84° Lead Bend
472B
Tubes (Sleeve Pack) MPXL5010G
Motorola Sensor Device Data
5
5 Page |
Páginas | Total 8 Páginas | |
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Número de pieza | Descripción | Fabricantes |
MPXL5010GC7U | Integrated Silicon Pressure Sensor | Motorola Semiconductors |
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